Saturn processor die-shot

[Gene Dorr]

(03-07-2022 10:07 PM)Paul Berger (Canada) Wrote:  What equipment was used to make the die shot? I have photographed chip dies using a camera with bellows and a microscope objective for a lens I have managed to achieve high magnification, filling a frame with a small area on a die, but lighting is tricky as is setting up you need to get the axis of the lens perpendicular to the die as depth of field is non-existent at that kind of magnification and if not perpendicular you cannot get the whole frame in focus.

I forwarded your question to McMaster, and he (finally!) replied:

I use an Olympus BH2-UMA illuminator based system. Sounds like he is using a custom camera setup, so his mileage will vary depending on how well he built it. That said, it sounds like his problem is he's using darkfield illumination (ie oblique / from the side) whereas I'm using epi illumination (the light comes from the objective itself, hits the sample, bounces back into the objective). In short epi illumination uses a half silvered mirror between the objective and the camera to achieve this.

Gene